Date of Award


Document Type


Degree Name

Doctor of Philosophy (PhD)


Electrical Engineering

Committee Chair

Jennifer English

Committee Member

Rhonda Gaede

Committee Member

David Coe

Committee Member

David Pan

Committee Member

Robert Lindquist

Research Advisor

Jennifer English


Microelectromechanical systems, Gyroscopes--Design and construction, Resonators--Design and construction, Flexure


An investigation into the benefits of quadratically tapered flexures for MEMS resonators and gyroscopes is performed and compared to the traditional non-tapered flexure design. Quadratically tapered flexures exhibit constant strain along the outer edge of the flexure whereas non-tapered flexures have significant stress concentration near the base of the flexure. The investigation considers peak stress, thermoelastic damping (TED), nonlinearity, and sensitivity to manufacturing variations. The impact of inside corner fillets on peak stress, TED, and resonant frequency is also investigated. Five new anti-phase lever mechanism (APLM) configurations for resonators and gyroscopes are designed and analyzed using CoventorWare 10. Fabrication experiment results are presented for an array of resonator designs to substantiate the FEA findings. Quadratically tapered flexures are found to reduce stress and thermoelastic damping while maintaining similar sensitivity to manufacturing variations, but at the cost of a slight increase in nonlinearity.



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