Comparison of single and concentric split-ring resonator generated microplasmas

Authors

Andrew T. Walsten, University of Alabama in Huntsville
Roberto A. Dextre, University of Alabama in Huntsville
Kurt A. Polzin, University of Alabama in Huntsville
Kunning G. Xu, University of Alabama in HuntsvilleFollow

Source

UAH PRC Research Database

Document Type

Article

Publication Title

Journal of Vacuum Science & Technology B

First Page

14001

DOI

https://:doi.org/10.1116/6.0001483

Publication Date

1-3-2022

Recommended Citation

Walsten, Andrew T.; Dextre, Roberto A.; Polzin, Kurt A.; and Xu, Kunning G., "Comparison of single and concentric split-ring resonator generated microplasmas" (2022). PRC-Affiliated Research. 3.
https://louis.uah.edu/prc-research/3