QCM Study of Silicon Oxide and Iron Oxide ALD Growth Rate

Authors

Justin C. Ikerman
Zheng Lu
Sijia Li

Files

Department

Chemical and Materials Engineering

College Name

College of Engineering

Advisor/Mentor

Yu Lei

Publication Date

2015

Document Type

Poster

Disciplines

Other Chemical Engineering

Recommended Citation

Ikerman, Justin C.; Lu, Zheng; and Li, Sijia, "QCM Study of Silicon Oxide and Iron Oxide ALD Growth Rate" (2015). Summer Community of Scholars Posters (RCEU and HCR Combined Programs). 136.
https://louis.uah.edu/rceu-hcr/136